较大的采用周期将使其不稳定。采样周期应不得大于总计时间常数的1/10(或极端情况下的1/5)。举例,如果PV近似为最终值2秒的2/3时,则采样周期应小于0.2秒,极端情况下为0.4秒。另一方面,采样周期也不得太小，如小于总计时间常数的1/1000,或ki*误差*dt的
MKS baratron 627B01TBC1B, 1 Torr, S001033099
Porter MFC, P2000i-C001, TEOS, 5.0 ML/Min
Porter MFC, P2000i-C010, TEOS, 10.0 ML/MIN
TEL TYB 211-1 / Gas, Gas Control Board
AMAT 0100-76088 CenterFinder sensor Board, 5,6,8 inch,
AMAT 0100-00825 ANALOG I/O PCB board
Aera MFC FC-7800CD, H2 3.5 SLM with calibration sheet.
Motorola MVME 340B 01-W3787B01B PCB, 84-W8787B01C
BM06240 R/J, COMP SIDE REV F PB02807 PRI BOARD
NOVOTRON NOVODRIVE ND21-5615KS-011?-00
MKS baratron 127AA-000.1B, 0.1 TORR
Tylan 2950 MFC FC-2952M 4V metal, Co, CHF4, lot’s of 2
5 Furon DV2-144NCD2, P/N 1103307 selinoid valve, 24 VDC
VEXTA 5 Phase Stepper Driver UDK5214NW, Vexta step
