CV跃迁幅度应足够引起PV的可观察到变化,但也不能太大,否则会破坏所测量的过程。最佳幅度为CV上、下箝位值之差的2~10%。设置用户参数由于所有的PID参数总是取决于所控制的过程，所以并无现成的预定值,但用迭代法可找到适用的回跻增益。
AMAT 0100-38032 E chuck controller REV 004 Board
MOTOROLA 147-011 MVME PCB 01-W394B, 84-W8964B01G
Hastings teledyne MFC, AFC-303, Propane 34 SLPM, 175 PS
UNIT UFC-1660 CL2 200 SCCM and O2 1 SLPM, lots of 2
MKS Baratron 627A01TBC, 1 TORR with connection valves
Eltrol Axis amplifier PCB 806107-03, assembly 3900052
IVS 0001-00060 Control module for SEM
Cole Parmer 15656-00 KVM switch box
Siemens micromaster 440 6SE6440-2UC17-5?AA1, lots of
MKS HPS 421 Cold Cathode Gauge Micro- Controller
Automated xy stage w/ Minebea 17DM-K101-D4V steppers an
Kollmorgen Magnet Driver AMAT 0190-70060
7 Centronics Interface PCB Board 068486-003
MKS MFC DPCA12T51CB00, AMAT 3030-10854, 50 sccm He
