在频率范围内,含–纯时间延迟的初级顺序延迟系统的转换功能如下:PV(s)/CV(s)=G(s)=K≠e**(-Tps)/(1+Tcs)测风这些参数的最快捷的方法是把PID模块置于Manual模式并把CV输出作小幅跃迁,改变Manual Command%Ref+13,并绘出PV响应对应时间的曲线。对于慢速过程,该工作可用手工方式完成.但对于快速过程,将借助图形记录仪或计算机图形数据记录包。
O’ring kit 9535006 0411577500
PRI BM26012 AB26012 and BM26011/K, Assy, V-STN XORB-100
116335 381163500
RENISHAW X-Y Stage, XY Stage S83867
Aera FC-7800CD 24Y0494 500 SSCM He Pressure Controller
Aera FC-7800CD MFC 500 SSCM He Pressure Controller
Power Triade ARX-X589, HP08186824
STEC PV-1501MC Piezo Valve Model,
Unit 1660 MFC, UFC-1660 O2, 10 SCCM
Tylan 2900 series MFC, FC-2900V, He, 100 SCCM, S0008
Tylan 2900 series MFC, FC-2900FV, He, 500 SCCM, S2017
6 AMAT 0020-18513, Diffuser, Clean port, HDPCVD ULTIMA
BODINE ELECTRIC 42A3FEPM-E4 GEARMOTOR, 130 VOLTS, CLEAN
MILLIPORE FC-2902MEP-T, SIH4, 1.5 SLMP
3 Mass Flow Meter Tylan FM-360, Argon and Air, untested
STEC PV-2000 MFC Piezo valve PV-2103MC in box
