确定过程特征PID回路增益、kp.ki和kd可由所控制的过程特征确定。其中两个关键问题为:1当我们通过固定戚改变CV时,PV改变有多大?开路增益是什么?2系统响应有多快.或者说CV输人跃迁(Stepped)后PV改变有多快?许多过程可由过程增益,初级或次级顺序延迟及一个纯时间延迟而模拟。

2 ELO touch system, 14 inch touch screen 311-40SD5-11,

2 TCR 20S30 source magnet power supply electronic measu

Lot of 5 Fujikin diaphragm valve FPR-NSDB-21-6.3?5-A

2 Tylan MFC, FC-780C-HT, UC, 20 SCCM, O2, S9605, S9606

2 Tylan MFC, FC-780CHT, 100 SCCM, N2, S9303, S9403

2 Tylan 2900 series MFC, FC-2950M-EP, FC-2900M-EP, N2,

2 Tylan 2900 series MFC, FC-2900M-EP, H2, 20 SLPM, S908

AMAT 0020-28754 PVD Endura Chuck, 200mm

AMAT 7300-027077 Chuck, 300mm, An AI, Metron

15 ATMI 500467-041415 Smart Cap Key, JSR-1860-35

Varian Cold Cathode vacuum gauge w/ nw25 port

AMAT 0100-20181 Operator Control Panel With Interlock S

AMAT 0190-09368 Mizar 7710 Video bPCB for AMAT

Lot of 12 Clamp Assembly Disc 233471447