PID积分器将圆整至零。例如,需时10小时或36000秒的慢速过程达到63%时其采样周期应为40秒或稍长些。如其过程不是特别快,通常不必要求使用0采样周期来处理每次PID扫描的PID运算。如果很多PID回路都使用大于扫描时间的采样周期的话.则若许多回路可在同时结柬处理运算时,可以设置较宽的PLC扫描时间变化范围。最简单的解决办法是通过一一个设置为0的位数组进行排列一个或多个位，使电流传至各单个PID模块。

SEMI GAS SYSTEM AUTOMATIC SWITCHOVER AND CYLINDER SCALE

2 Edwards high vacuum INT, APG-M-NW25 ST/ST active pira

AMAT 0020-18385 Block, Daul Gas Feed HDPCVD Ultima,

AMAT Digital I/O BOARD 0100-20003 APPLIED MATERIALS

AMAT 0100-20003 Digital I/O BOARD, REV G

2 MKS Type 250 pressure flow controller, 250B-1-D and 2

3 Siemens PLC, 6ES7 235-0KD22-0XA0, 6EP1 331-1SL11, 6ES

E237456 HK-004 94V-0 AC115-03

Diavac Limited KF25 Isolation Valve LCAVB-25 1246056-29

MKS Baratron 127AA-000-1E, Range: .1 Torr

Kepco Flushing 0024782 Power Supply

AMAT 0020-70223 Endura-Centura Chamber Blank Off

Asyst 9700-3436-01 Front Wafer Loader Cassette Nest

Lam Research 853-015030-001-?C-3611 Assembly, Manual, Ma

2 MKS 628A baratron 628A.1TBF, 0.1 torr, good for parts

Tuthill pump P11033

Porter MFC 201-DKASVBAA, Ethane 25 SCCM, 50 PSIG

TDK Lambda power supply RKE24-50K, model 0024782, 12-8A

MFC Aera FC-D980C, SF6, 50 SCCM, looks clean