CV输出然后与CV上、下箝位值对比。若有一限值超出,则CV输出置位于该箝位值。如果速率或幅值限超出修改的CV值,则内部积分器值会调整至与该限值匹配以避免重置终结(resetWindup)。最后摸块会检验输出极性(配置字%Ref+12的第二位)并如果位为1的话,改变输出的符号。
MKS RGA Spectra Microvsion or HPQ2 + Vacuum Controller
RGA MKS Spectra Microvsion or HPQ2 & Vacuum Controlrer
AMAT 0200-18041-P1 Bottom Flange Quartz
VERIFLO CORP GAS VALVE 45200254
THERMOCOUPLE TYPE K 39 INCH VAC /39 INCH AIR KF40
PARKER VERIFLOW VALVE, 9444A0PLPN0SFSF?F, 48200029
vacuum chamber interface Flange, ASA 10″ look very clea
JA-RELAY 1B-TM-DC24V-P 250 VAC 20 Pieces, Solid StateRe
TWO MKS MFC Type 649, 649A11T11CAVR-S?, Ar 10 SCCM
MKS baratron 622A11TBE, 10 Torr, looks clean
Tylan 2900 series MFC, FC-2900V, Ar, 500 SCCM, S9115
Tylan 2900 series MFC, FC-2900V, O2, 50 SCCM, S3072
Aptech AP3550S 2PW-MV4-MV4 valve diaphram air, lots
HINE DESIGN BOARD ASSY 778-11, FAB 777, REV H
BROOKS AUTOMATION BROOKSNET I/O MODULE DEVICENET, 002-8
Hathaway HTO15O1A18HE Optical Encoder PSA-17-060
MKS 122AA-01000BB, Baratron 1000 Torr
Aera MFC TC FC-980C, MULTI, MULTI-1
Aera MFC TC FC-980C, BCL3,100 SCCM
Aera MFC, 10 RA FC-980C, SiH4, 20 SCCM
Aera MFC FC-770AC Ar 200 SCCM
