采样周期和PID模块计划表PID模块是一一个模拟控制功能块的数字补充,所以PID输出公式中的dt采样时间不是模拟控制的无穷小的小值采样时间。多数控制过程可近似为一个带有1或2级延迟的增益,可能为一纯时间延迟。
Mass Flow Meter 1258B, Argon, lots of 2
MKS BARATRON 628A.1TBF, 0.1 TORR
SMC NP420-DN1 VV5Q11-ULB98018?1,16 position pneumatic va
Kalrez Ultrapure 78-0161 Oring compound 8101UP, 10-1/2
Chemraz Greene tweed 9277-SS592, 11.484 ID x 0.139
Chemraz Greene tweed 78-2763 Oring N053338926SC513?,
Intellisys TBV-IQA-400-ISO?-100-S01 Throttle butterfly v
Klarez Sahara2-373, 373 Oring, compound plasma 8575
Novellus 27-156710-00 Controller I/ 0 Dualcap Firmware
BOC EDWARDS interface module, U20000521
Watlow dual temperature controller, AMAT 0190-26148
KLOEHN SYRINGE PUMPS MOTORIZED INJECTOR VALVES 19311
2 MKS 250B-1-D Type 250B Throttle Valve Controller
DSC communications corp. 300-8106-900 revE ABCU 31F PCB
AMAT 0010-18147 Assy water filter to AMM1 HDPCVD Ultima
