这是因为用户已把PID模块控制从梯形逻辑状态撤出。内部参数字为:PID算法选择(PIDISA或PIDIND)和增益PID模块可选择独立项(PID-IND)或标准ISA(PID-ISA)两种PID算法之-进行编。其间算法差别为如何定义积分和微分增益。要弄懂这些内容:PIDISA与PIDIND模块之间的差别标准ISA PID算法(PIDISA),对每个比例、微分.积分项加入的比例增益,独立项算法仅对比例增益项加入比例增益。如图4-2方块图所示。否则,两者算法相同。
Two AMAT 5000 Throttle Valve Assembly
Lot of 2 VAT KF 40 right angle VACUUM ISOLATION VALVE,
Lot of 2 Granville Philips 330 GP 330 Ion Gauge Control
Novellus Tylan General Celerity AC 4, AC413C Throttle
Porter MFC D2000i series, TEOS 20.0 ML/MIN, D2000I-C039
VARIAN WAVEFORM GEN III ASSY 01907110 BOARD
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EMC-1 94V0, BM23475L11R REV B
PRI EMC-1 94V0, BM23475L11R, PC23475 REV B COMP SIDE
MKS throttle valve 653-4-100-2
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MFC LF-A4OM-A-EVD, Liquid: TEB, Flow Rate: 2.0g/min
