如前页表4-5所述,PID功能块可读取13个用户参数,而使用其余的40字RefArray用于内部PID存贮。–般情况下用户不需进行修改。如果用户在一长时间延迟后在Auto模式下正调用PID模块,可用SVC-REQ#16加装当前PLC逝去时间时钟到%Ref+23去更新上次PID解决(处理)时间以避免积分器上发生多级变化。若已设置超驰低位控制字(%Ref+14)至1,紧接的4位控制字必须设置为控制PID模块输人触点,内部SP和PV必须设置。
HAMA SENSORS ZX-73APIH, lots of 2
MKS baratron 127AA-00001E, 1 Torr with calibration shee
MILLIPORE, ADAPTORR MODEL AC-2, Millipore AC213C REV C
Unit MFC 8565C, N2 750 SCCM with calibration form
SEMITOOL 4009-02, MOTOR CONTROLLER, Automation ALC250R
Beam Alighment PCB Board 0001-00208-00
AMAT 0226-09937 and AMAT 0226-09677 Pump Dist PCB
SCV KIT2 SCT TD4SC-GC-1671FA Valve, SST, 06-16216-00
Aera MFC, TC FC-D980C SiH4 Gas, 750 SCCM, S25004, NOVEL
ESD Semtronics Sensors
11 MKS BARATRON 852B61PCJ2GC, 60 PSIA
Jennings UCS-200-15S and CVCJ-1000-3S, variable capacit
Mattson 15 x 15 Quartz Insulator,
Tylan General CMS-11S02, 0-10 TORR, lots of 2
NOVELLUS foreline 010-128858-00 with MDC valve and GP 2
Perlast Oring, Translucent perlast G67P, 329.80 x 3
2 AMAT 0150-20160 EMO interlock Cable
