故障数据程序中,EQ-INT块将表中机架/插槽的地址与十六进制常昼相比较。当发生故障的机架/插槽满足上述指定规则,其内部线圈%M0007接通。若%M0007接通，则其常闭触点将断开,禁止PLC的关断。相反,若发生在不同模块的故障导致%M0007关断则常闭触点闭合,PLC关断。
Lam 230-140148-308 ESC, 8 inch, look in Box
MYKROLIS MFC intelli flow 3XP, N2 1000SCCM lots of 2 us
STEC 0.2g/min TEPO LFC LF-310A-EVD
MKS baratron 122AA-00010AB, 10 TORR, lots of 2
Inficon AG, LI-9496 Balzers, BPG400, Pirani gauge 353-5
CTI CRYOGENICS KEYPAD, FOR ON-BOARD SYSTEM
CTI CRYOGENICS KEYPAD CONTROLLER, FOR ON-BOARD SYSTEM
AMAT ANALOG I/O BOARD 0100-20100 APPLIED MATERIALS
AMAT 0100-20100 AI/O ANALOG I/O ASSY BOARD, REV P4
AMAT 0100-20100 AI/O ANALOG I/O ASSY BOARD, REV A
MKS BARATRON 627B12TEC1B, 100 TORR, looks clean
Brooks MFC 5964 series, Argon 500 SCCM
Brooks MFC 5964 series, Argon 500 SCCM, looks clean.
Millipore MFC Tylan 2979M Series FC-2979MEP5, O2, 1 SLP
Tylan MFC 2979 series FC-2979MEP5-L, C4F8, 50 SCCM, loo
Millipore MFC FSCGD100QE09, H2, 100 SCCM, With cali
AMAT 5000, 0010-09341 CVD CHAMBER WAFER LIFT ASSEMBLY
3 Edwards high vacuum INT, APG-M-NW25 ST/ST active pira
2 EFO 1500XL liquid adhesive dispenser, 125mA 250V Fuse
KLOEHN SYRINGE PUMPS MOTORIZED INJECTOR VALVES 19560, m
3 Fluorosilicone 22.50 x 1.29 Oring, Blue, 70, 22-3
