PID指令的操作常规自动操作将在每次扫描时调用PID模块,有电流时为Enable,无电流时为Manual输人触点。该模块即把当前PLC逝去时钟与上次贮存在内部RefAray的PID解答时间进行比较。如果此时间差大于RefAray的定义在第3个字(%Ref+2)采样周期的话，PID运算就用时间差进行解答,且把上次解答时间和控制变量进行刷新。在Automatic方式下,输出CV置于手动命令参数%Ref+13中。
3 Unit MFC UFC-1100A, N2 1SLM, 300 SCCM, 50 SCCM
6 AMAT4020-01416 filtr AIR/WTR 1000 PSIG vacuseal
IN USA NDIR OPTI-sense 5000 lots of 2, ,
LAMBODA LFS-43-15 REGULATED POWER SUPPLY
UNIT UFC-8160, NF3, SiH4, PH3, lots of 3,
PB02807 BM18164 DAN 9710094
BM26015/L AB26015/N ASSY, H-STN XORB-100
BM302960000 /D 9923DAN
502622 BM303030200
PROM DISK 66700301
AMAT 3870-04001 Slit Valve Door
TYLAN 2979M Mass Flow Controller FC-2979MEP5-WM, Gas O2
MKS baratron 622A11TBE, 10 torr with calibration sh
MKS baratron 622A11TBE, 10 torr, with calibration s
Unit MFC UFC-8561C, H2 100CC lots of 2
