由于输人设置点(Set Point).过程变量(Process Variable)和输出控制变量(Control Variable)使用频繁,故以缩写SP、PV.CV代替。因均为16位整数,所以许多参数必须定义成PV计量或单位或CV计量单位。例如,SP输人应与PV范围统一
Unit UFC-1660, HBr, 100 SCCM, CALIBRATION SHEET
BROOKS 5964 MFC, SiH4, 200 SCCM, CALIBRATION SHEET
BROOKS 5866 MFC, 300 SCCM, He, Novellus 22-045874-00
Mykrolis MFC FC2900V 4V Vitor, N2(Ar) gas, 5 SCCM w
Millipore MFC Tylan 2979, FC-2979MEP5, O2, 50 SCCM
NT intergrated flow controller 6500-xx-F03-D12?-K-P2-U2-
7 Furon DV2-144NCD2, P/N 1103307 selinoid valve, 24 VDC
13 VICOR VI-263-CU, convertor M24V/8.3 ALT, Novellus 27
Aera MFC, FC-7810CD, CO2 Gas, 15 SLM range, S 3822
TYLAN GENERAL CDL-21S06-EMC 0-100 T0RR RANGE, lots of 3
Aera FC-7810CU 20 SLM O2
UNIT 1660 UFC-1660 He 10 SLPM with calabration sheet
5 granville-phill?ips 275 convectron gauge 275 821, pric
Lot of 18, Xilinx XC7354 Complex Erasable Programmable
AMAT 0150-09033 and 0030-70085 Monitor Interface, Front
SMC NP420-DN1 VV5Q11-ULB00004?7
SMC NP420-DN1 VV5Q11-ULB98018?0
MDC right angle isolation valve LAV-250-PAA, ISO 250 fl
MKS MASS FLOW CONTROLLER 5877, He, 10 SCCM lots of 2 US
UNIT MFC UFC-8165, 10L, Gas N2, in box
