PID的用途即用于闭路过程控制。Series 90 PID功能模块可对比过程变量反馈(PVF)和期望过程设置(desired process Set Point)并以误差为准进行控制变量输出更新。模块利用PID闭路增益(gain)及贮存在40个16位字数组中的其它参数(后面还将讨论)在所希望的时间间隔内进行PID运算。全部参数均为16位整数字,且具有与16位模拟过程变量兼容性。由此就可以把%AI存贮器作为输人过程变量,%AQ用作输出控制变量。示例包括了典型的输人。

2 MKS 253A Throttle valve 253A-11010, 253A-2-50-2-S, KF

Brooks MFC 5853E series, Air, 250 SLPM, 5853EABA2A1D4BA?

2 Linear actuator 400MM rail two long NP105, 95086

Unit MFC UFC-1661 Mass Flow Controller, H2, 10 SLM,

2 Unit 8160 MFC, UFC-8160, HF gas, 1 SLPM, S002500, Reb

2 Norcal products ESVP-1502-NWB, isolation valve 90

Stec SEC-4400 MFC, SEC-4400M SF6 300 SCCM with calibrat

JDS Uniphase Laser 2214-25MLUP

Trazar Corp (SCM) Sealed Tube Assembly 02-161584-00

TWO MKS MFC P6A004202RAT0 , Ar, 200 SCCM, Bin 5

2 AMAT 3870-01212 Norcal Isolation valve, 3 way KF 40,

Porter MFC D2000i series, TEOS 5 ML/MIN, D2000I8C001

Bentek DC PC BOARD, reliance, 03-188758-00, Novellus

 

BROOKS MFC PureDigital 6256 SILANE, 500 SCCM,