为PARM给出的参考地址可表示为任何类型的字存贮器(%R,%AI或%AQ)。该参考地址构成功能模块“参数块”的第-组。相继的16位存贮单元将存贮其它参数。所需参考地址的总数取决于所用SVCREQ功能模块的类型。参数块既可用作功能模块的输人
LAM ceramic ring 716-011830-006
ICS ADVENT OEMC-06-06 module controller
Kalrez 17471 oring compond 4079, 22-154780-01, 18.9
2 Chuck Assembly 6″ 01-20-04076-06
2 Chuck Assembly 6″ 01-20-04705-06
MILLIPORE intelliFlow DEVICE NET, N2, 50 ,400, 200 SCCM
Lot of 2 STEC IV-2410AV-02H Injector Valve AMAT #0
Motion Engineering SA-NOV controller lot’s of 2
2 Linear stage X axis, DS4-200-C-5G-X2?3-OE4-LP2-HP1-B?S-
MKS 660B10 Digital readout and power supply for MKS equ
STEC Mass flow meter SEF4400M N2 100sccm with cal sheet
Ophir Nova display and Ophir LaserStar, no power supply
AMAT 0190-05771 LCF sensor interface PCB board
