SVCREQ功能模块有三个输入参数和一个输出参数。当SVCREQ接受能流后,则要求PLC完成指定的功能FNC。有关功能模块的参数从为PARM给出的参考地址开始。除非是–不正确的功能号数。不正确的参数或超出特定的参考地址范围，SVCREQ功能模块均将通流。其它故障原因将在后而加以介绍。
STEC LF-410A, TEPO 4.0 g/min Liquid Flow Controller
PCB Robot linear motor control amplifier LDH-S3-4/5
2 AMAT 0150-20585 Chamber pump interface cable, end
2 MKS baratron 722A-28414, 5 Torr with calibration shee
2 Stec MFC Injection valve Metal Seat UCV IV-2410AV-03
2 Horiba stec MFC LF-410A, LF-410A-EVD, TEOS, 3.0 g/min
2 Horiba stec MFC LF-410A, LF-410A-EVD, TEOS, 4.0 g/min
2 AMAT 3030-07719 Horiba stec MFC LF-310A, LF-310A-EVD,
2 AMAT 3030-08009 Horiba stec MFC LF-310A, LF-310A-EVD,
Neslab Chiller HX-75A, LAM 778-250779-00, No Compressor
Neslab Chiller HX-75A, TU-1 pump, No Compressor
AMAT HDP Microwave Waveguide ASTEX D13604
16 Perlast 22-173564-00 Oring, white perlast G71H,
MITSUBISHI PLC A1S62PN, A1SHCPU, A1SX41, A1SX81, A1SY10
Lot of 47 Novellus 22-105481-01, Oring, AS568-326,
