终止主令控制继电器(ENDMCR)功能用以在-个MCR功能之后再继续程序的正常进行。当与ENDMCR相关的MCR动作时,ENDMCR功能将导致程序的执行以正常流向再继续进行。当与ENDMCR相关的MCR功能未起作用时,ENDMCR将不起作用。Logicmaster 90-30/20/Micro软件将支持ENDMCR功能的两种形式,即非嵌套形式与嵌套形式。非嵌套形式ENDMCR功能只能与非嵌套MCR功能一起使用;嵌套形式的ENDM-CRN功能只能与嵌套MCRN功能一起使用。

2 Leybold Turbo Controller NT 450

IPV 8 Position Gas Panel With 8 Mykrolis MFC and 26 CKD

TYLAN MFC FC-280 AV, N2 100 SCCM, lots of 4

MKS throttle valve 153D-15973, type 153 control valve

2 Gas distribution panels w/ 3 way valves, manual flow

Lytron Chiller RC006G03BB1C020

Asyst OFH000Q Wafer Orientor

HEWLETT PACKARD 54504A DIGITIZING OSCILLOSCOPE 400MHz

 

4 Edwards high vacuum INT, APG-M-NW25 ST/ST active pira

3 AMAT 0190-01376 dual metering valve assembly,MKS 750B

3 Proteus switch 800 series, proteus 0504SA4, 24 VD

ASYST TECHNOLOGY P/N 01270-001, Cassette loader,

CTI ON-BOARD NETWORK TERMINAL CONNECTOR