注意351CPU的每个ENDMCRN只能使用一个MCRN。可多个MCRN功能对应单一的ENDMCRN,不包括351和352CPU,这与嵌套JUMP功能相类似,其中可有多个JUMP对应于同一个LABEL。MCR功能模块的两种方式有相同的参数
TWO STEC LF-310A-EVD Ta(OC2H5)5, 0.2 g/min
STEC LF-310A-EVD, TEPO 0.1 g/min lots of 2
Brooks MFC 5866E, N2 30 SLPM, in Box
national instruments GPIB-120A, Bus Expander/isolat?or,
STEC 4400, MFC, Ar, 2 SLM, Calibration sheet.
STEC MFC SEC-3400SL-UC, N2, 100SCCM
STEC MFC SEC-3400SL-UC, N2, 100SCCM, In the box.
STEC MFC SEC-4400, Ar, 1 SLM WITH CALABRATION.
STEC MFC SEC-4400M NH3, 1 SLM, With CALABRATION SHEET
10 Furon DV2-144NCD2, P/N 1103307 solenoid valve, 24 VD
Lot of 10 Furon DV2-144NCD2, P/N 1103307 solenoid valve
AMAT 0010-009416 Etch Chamber RF Match, Untested
Mykrolis MFC FC-2902MEP5-T, N2, 5 SLPM Gas range, A
Mykrolis MFC FC-2902MEP5-T, N2, 5 SLPM Gas range, A
Mykrolis 2900 MFC FC-2902MEP5-T-4?V, N2, 5 SLPM Gas
Mykrolis MFC FC-2902MEP5-T, N2, 5 SLPM Gas range, A
Brooks MFC 5964, Argon, 500 SCCM, calibration paper
Brooks MFC 5964, Argon, 500 SCCM, calibration paper
3 SMC NP420-DN1 SERIAL INTERFACE UNIT, SMC Manifold
