END功能模块将提供–逻辑暂时结束的功能。程序将从第一个回路执行到最后一个回路,或执行到第一次遇到END指令处。END功能模块将无条件中断程序的执行。在回路中,END功能模块之后不能有其它程序。没有超过功能的逻辑被操作,而控制将转到下次扫描的程序起始处。END功能由于它可以中止任何正在执行的逻辑过程,因而对调试程序是有用的。
CYBOR PUMP CONTROL MODULE MODEL 505E, 505C2
4 Unit MFC 1660, UFC-1660 BCl3 200 SCCM, N2 500 SCCM, C
ENI RF Generator LPG-6A , Low Frequency, , as is
LOT OF 8 Hewlett Packard TTL POD 15464-69601 PRICE
Unit 1660 MFC UFC-1660 Cl2 50 sccm, BCl3 20 sccm, N2 30
ALD HDSIOC 0 NOVELLUS 02-295367-00 VERSION 5.0 REV. A
MKS 649A11T11CAVR N2 10 SCCM, 10 torr, lot of 6
4 Brooks MFC 5866RT, Argon, 3 SLPM
Comdel CPS500AS RF Generator, AMAT 0190-13320
BROOKS Mass Flow Controller 5850 O2, N2, HCL, lots of 3
3 Unit 3000 Series DeviceNet UFC-3165, AMAT 3030-03330
Boc edwards D37209000 control pump
TDK-Lambda GENH750W Power Supply, Input Rating 100-240V
LSA CleanPart Ceramic Ring With Lining 4507346594
ENI Polara-260 Bipolar Pulsed Supply 0190-01428
2 Stec MFC SEC-4400MC, N2 200 SCCM, with calibration sh