END功能模块将提供–逻辑暂时结束的功能。程序将从第一个回路执行到最后一个回路，或执行到第一次遇到END指令处。END功能模块将无条件中断程序的执行。在回路中，END功能模块之后不能有其它程序。没有超过功能的逻辑被操作,而控制将转到下次扫描的程序起始处。END功能由于它可以中止任何正在执行的逻辑过程,因而对调试程序是有用的。

CYBOR PUMP CONTROL MODULE MODEL 505E, 505C2

4 Unit MFC 1660, UFC-1660 BCl3 200 SCCM, N2 500 SCCM, C

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Unit 1660 MFC UFC-1660 Cl2 50 sccm, BCl3 20 sccm, N2 30

ALD HDSIOC 0 NOVELLUS 02-295367-00 VERSION 5.0 REV. A

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2 Stec MFC SEC-4400MC, N2 200 SCCM, with calibration sh