只有MCRN可使用351和352CPU。对每个ENDMCR指令仅对应一个MCR指令。嵌套MCR与ENDMCR的范围不能与任何其它MCR/ENDMCR指令对或JUMP/LABEL指令对的范围重叠。非嵌套MCR不能在任何其它MCR/ENDMCR指令对或JUMP/LABEL指令对指示之内。除此之外,一个JUMP/LABEL对或一个MCRENDMCR对亦不能在另一个MCR/ENDMCR指令对的指示之内。

3 Horiba stec MFC LF-410A, LF-410A-EVD, TEOS, 4.0 g/min

 

Aera MFC, FC-D981SBC, NF3(0.500) gas, 10 SLM sealed in

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2 Kepco 0024782 Robot Power Supply 27-053701-00. one un

Advanced energy 2279-002-A

Aera MFC, FC-D980CBF, H2, 1.5 SLM, with calibration

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AMAT 0190-20048 Synergy v21 PCB Board

SVG 99-80207-02 SPIN STATION EXPANSION BOARD, REV A

Tylan general AC-2 Adaptorr model AC213C REV A millipor

4 Unit 8560 series UFC-8561C H2 HCL, AMAT 3030-12306

Kensington lab, 77-4000-0108-00 Robot axis multilink Z,

2 AMAT 0021-09550 chassis plate throttle 5 phase

AMAT 0100-38027 Seriplex I/O distribution board

8 AMAT 0020-20123 Heater isolater ceramic, 810-00027

4 Norcal product AMAT 3870-01244, Isolation valve K