Logicmaster编程软件将提供一个显示程序执行的结東[END OF PROGRAM LOGIC]指示器。如果没有END功能模块在逻辑中编程，则使用该指示器。在一动作的主令控制继电器(MCR)与其相应终止主令控制继电器(ENDMCR)功能之间的所有回路

 

Lot of 2 Novellus 02-140949-00 REV C, Main system start

Lot of 2 MDC LAV-250-PAA 1MC, Vacuum Isolation valves,

AMAT 0010-30091 HV MODULE ESC, 5200 Centura Module assy

Novellus 27-163237-00 controller, Trust automation TA20

Merlin engineering works, VCF PWA 4586, FAB 4585 B, ME1

AMAT 0100-A1211 CVC3 board

Perkin Elmer 859-0742-001 AFA PCB module, SVG ADSP-

NRC diffusion pump 0162-2. J-101

Varian Diffusion pump 85826-316, VHS-6, 208 volts

AMAT 0100-A2151 DAS-200, ME-S-8986 94V04907 batch numbe

AMAT 0040-09212 Wafer lift ceramic assembly, P5000 CVD

Digital dynamic I/O controller 27-10157-00 novellus

Lot of 3 Novellus 16-274114-00 Vacuum Bellows Assembly

2 Stec SEC-4400 MFC, SEC-4400M, WF6 gas, 10 SCCM fl