DOI0功能模块有4个输人参数和一个输出参数,当功能模块接通,并指定输人给定地址,则从给定地址(ST)起始而END指令处结束的输人点将被扫描。如果为ALT指定一给定地址,则新输人值的复制被从那一给定地址起始存人存贮器.且真实的输人点则不被更新。ALT必须与被扫描给定类型的规模相同。若对ST与END采用数字给定,则ALT也必须是数字的。如果没有为ALT指定给定地址。则真实的输人点将更新。

TWO Aera MFC FC-7820C, N2 100 SLM

ROLLER BRUSH CELL HDSIOC NOVELLUS 02-336512-00 REV. 1

HDSIOC ROLLER BRUSH NOVELLUS 02-308058-00 VERSION 4.72

XCEDA FAC HDSIOC NOVELLUS 02-309772-00 VERSION 4.72

ISOC HI-LO TRANSFER NOVELLUS 02-131736-00 REV. A

PDL OXIDE HDSIOC 3 NOVELLUS 02-273741-00 VERSION 4.72

ISIOC DAMA CLEAN BB-DFE DIGITAL DYNAMICS G19-10000-00

SIOC wts-vh sioc 1 NOVELLUS 02-123968-00 REV. 2

SEREN I1600 ICP Generator

AMAT 0041-05383 200mm Zone 5 Profiler Peek

vacuum chamber Flange, Cryo Turbo, Gate valve interface

VME MOTOROLA 2304-900

4 Horiba stec MFC LF-410A, LF-410A-EVD, TEOS, 3.0 g/min

4 Horiba stec MFC LF-410A, LF-410A-EVD, TEOS, 4.0 g/min

3 MKS baratron 127AA-00001E, 1 torr, sealed bag

10 Perlast 22-291392-00 Oring, 2-279, G67P, 329.80