每个功能模块有四个输人参数和两个输出参数。当功能模块接通电源时,数组将从(AR+输人NX)开始被在寻。这是数组的起始地址(AR)加上输人该数组的变址(输入NX)。查寻将继续进行,直到查寻对象(IN)的数组单元已找到,或直到被查寻数组的末端。
Advanced Energy PDW 600 RF Generator, AE 3156014 Lam #
4 MKS throttle valve 153D-2-5-2, with KF 50, looks rebu
4 MKS baratron 124A-11848, 2000 TORR, sealed bag
SMC ThermoCooler Chiller HRGC002-AN-T
Lot of 2 Novellus 02-120820-00 Porter Assembly, DEG
AE RFPP LF-5 RF Generator and RFPP ATL-100RA RF Match
Nikon objective lens CF Plan 5X/0.13 TI
Brooks automation robot wafer handler controller series
Kinetics Thermal systems RC152ZLAM Chiller,
MKS On-Line process sense endpoint detector 20704A-2535
Affinity Chiller PNE-H20L-ED36CB?CO
AE Advanced energy MDX-20K master 3152223-003Y power su
AE Advanced energy MDX-10K master 3152012-041AB power s
Advanced Energy LDM plasma RF generator 2026-000-D
Novellus 02-103960-00 Controller Platform P166/64
COMDEL CLX-1250 RF Generator 1.75-2.15 MHz
Novellus Match 02-282128-00,
