当功能模块接通电源,它便进行变换，以使通过输出Q的结果有效。当接通电源时,功能模块将通流,除非规定的变换导致数值超出0~9999的范围。DOV0(DOIO)功能模块用来处理程序运行时,为每次扫描更新输人与输出。除常规V0扫描外,DO 10功能模块还可用来对编程期间所选的IO接口进行更新。
TWO MKS Throttle valve controller 651D-15413
Novellus 02-105005-00 ASSY,MC,P166,W/?8 RS232 controller
2 MKS baratron 627BU2TBE1B—S?, 0.02 Torr
2 AMAT 0010-09341 CVD wafer lift assembly, AMAT 0010-10
ENI OEM-25A-21091-5?1 RF Generator, 2500 W, 13.56 MHz,
CYBOR Module Controller 00506-05, 18 VDC 10.5 AMPS
AMAT 0010-09181 precision 5000 DC power supply +- 15V +
ENI LPG-6A RF Generator, Low Frequency
3 MKS baratron 124A-11848, 2000 TORR, with calibration
ENI OEM-12B-02 RF Generator, 1250W at 13.56 MHz,
ENI GHW-12Z Genesis RF Generator 1250W, AMAT 0190-09832
ENI RF GENERATOR OEM-12A XL, OEM-12AL-01
ENI RF GENERATOR OEM-12A Solid state power generator, O
ENI ACG-3 RF Power Generator
5 MFC, UNIT UFC-1660, N2, Cl2, He Unit MFC
