功能模块的故障(FT)输出在下列情况之一均可能置为ON:1.规定目标地址不存在(SYSID)2.规定任务对设备无效(TASK)3.数据长度为零。4.设备状态的指针地址(指令块的一部分)不存在。这可能是由于存贮器选型不正确。或存贮器类型内的地址超出范围。

4 Stec MFC SEC-4400MC, Ar 500 SCCM, with calibration sh

7 STEC MFC SEC-4400M, O2, SiH4, Ar, BCl3, Cl2,

2 Brooks 4002-9746-01 Robot End Effector, 9701-3180-01

Novellus 02-158811-00 Main system power panel w/ scrub

Novellus 02-158811-00 Main power panel w/ scrubbed exh

Hamilton Microlab 500 series, 8041-02, Syringe diluter

lots of 3 FTS systems RCD151ZLAM chiller, 50/60 Hz 1 ph

AMAT 0040-09098 AMAT 5000 Robot blade, 8 inch with cap

AMAT 0010-09195 Robot assembly P5000 CVD tool, 4, 5, 6

VAT 02112-BA44-0001?/0102 RECTANGULAR GATE VALVE MONOVAT

lot of 4 SIEBE ENVIRONMENTAL CONTROLS MSC-U1000 4 chann

Trazar Corp. RF Match RFDS-1, REV 3, P/N 553-07491-00

Neslab chiller HX+100W/C, 24376-01 REV 0.5, CoolFlow re

EDWARDS DP80 Dry Vacuum Pump, , as is

Brooks Automation 129973 Series 8 Controller, 100-240 V

CTI Cryo pump 8, Model # 8033165, surplus item