如果位串1和I2中所有相对比的位相配,此功能就设定“坏比较”输出MC至0,且BN至输人串中的最高的位数。然后比较停止,在MSKCMPW的下一次启用时,将被复位至0。如果发现一坏比较当目前正在比较的两个位不同时,此功能模块检验位串M(屏蔽)中相对应的已被编号的位。如果屏蔽组为”1″,比较继续直至它达到另一个“坏比较”或输人串的末端。
Automated microscope J-MAR 3012-05 with large XY stage
Brooks automation 143668 Robot, with dual Robot Blade,
Orion Reticle Photomask Inspection with Aludra system
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AE Advanced Energy PDX 1400 RF Generator, AE 3156024-14
Pfeiffer TMU1001 P Turbo pump,TPS 600 turbo controller,
Brooks 002-7090-14CUR Robot with 101376 Controller, I/O
RORZE robot wafer handler RR701L1211-3A3-?111-1, wit
2 Zygo KMS400 Inspection equipment, Objectives, stages
APPLIED MATERIALS, AMAT 0010-21668 PVD magnet.
4 APEX 3513 A3M5K000EA120B0?01A and A3M3K000EA120B0?
11 AMAT 0010-40099 ETO RF Matching Network Erhorn pric
Brooks Automation Robot 121669
3 Brooks Mag 7 Robots, 2 ea 002-1500-02, 1 ea 002-1500-
Tegal source reactor ICP CR1350-00300 with Tegal MHZ co
TEL ETCH 2 ENI OEM-25B RF generator rack + 2 Ebara ET60
IGC Polycold Cryogenic refrigeration unit 1XCL-1