想要有效进行自动化仪表故障的预防，还要，以便实现设备故障及隐患的准确定位，继而使故障的发生得到抑制。比如，维护人员可以使用观察法对仪表进行观察，从而通过观察仪表是否存在老化、进水和异声现象判断设备的运行状态。
Rexroth HDS03.2-W100N-H?S12-01-F AC Servo Drive 11190010
Indramat TDM3.2-020-300-?W0 AC Servo Drive Controller
Siemens Micromaster 6SE9216-8CB40 AC Drive MM150/2 230V
Spellman Electronics SL300 High Voltage Generator X2156
Equipe PRI 300mm Wafer Pre-Aligner Automation PRE-300BU
Edwards iQ System IQDP80 A532-80-905 Dry Vacuum Pump IQ
Cooper Power Tools STM12 960900 Servo TM12 Screw Module
Pfeiffer Balzers Vacuum TCP600 Turbo Pump Controller
Hiden RGA Gas Analyzer Interface Spectrometer HAL 301
Parker Compumotor SX6-Drive MicroStep Indexer 87-011751
Thermo Forma Scientific Model 2959 Hi-Stage R-134-A 115
Parker Compumotor SX6 MicroStep Servo Drive Encoder
Parker Compumotor SX6-Drive MicroStepping 87-011751-01
Data I/O PSX 500 Parallel E-EProm Programmer 44PLCC
Radyne DMD2401 LB/ST Satellite Modem ODU Controller
Huntington A00-1592 Pneumatic Valve w/Turn-Act Actuator
Huntington A00-1592 Pneumatic Valve Turn-Act Actuator D
Huntington A00-1579 Butterfly Valve w/Turn-Act Rotary A
