一个MCRN指令与它相应的ENDM-CRN指令必须完全包含在另一MCRN/ENDMCR对之内。一个MCRN功能可放在程序的任何位置,只要它是与其它MCRN功能正确嵌套,而在任何非嵌套MCR或非嵌套JUMP的范围之内不出现。

Mykrolis 2950 series MFC FC-2950MEP5, NF3, 100 SCCM

Mykrolis 2950 series MFC FC-2950MEP5-4V, SiH4, 100

MKS Signal Conditioner Model 621C11TBFHC

Varian E11068890 Vacuum Switch Assembly, Source Safety

2 Inficon pirani gauge FL-9496 Balzers BPG400, 353-502,

2 Granville Philips GP 307 Vacuum Gauge Controller 3072

SWAGELOK 6LVV-A61VD2DP-A?SAS-NY lots of 2

2 MKS baratron 127AA-000.1E, 0.1 Torr, looks very clean

2 MKS baratron 625B 23TCEFU, 2000 Torr, S001032532

VAT PM-5 Adaptive Pressure Cont, LAM 796-093088-004

VAT PM-5 Adaptive Pressure Controller With manual

2 Vat gate valve Novellus 02-115275-00, MFG part number

Leybold Quadruvac Q100 mass spectrometer, with cables

NT intergrated flow controller 6500T2-F02-D12-?A-P1-U1,

MKS throttle valve 683B-24617, looks

Aera MFC FC-7810CD, CO2 15 SLM, with calibration sheet

3 STEC MFC SEC-4400M BCl3 100 SCCM,

3 MKS baratron 127AA-000.1B-SP?HP, 0.1 TORR,

2 Stec LF-310A liquid flow MFC, LF-310A-EVD, TEPO, 0.25

TWO STEC LF-310A-EVD TEPO 0.25g and TiCl4 0.5 g/min