如果程序需要与智能模块(诸如Genius通讯模块(GCM)或可编程协处理器模块(PCM))通讯。则使用通讯(COMMREQ)功能。下面所提供的有关信息则表明了COMMREQ功能的每个模块的编程要求,则在模块的资料中已作介绍。

Advanced Energy Navigator RF MATCH 3155132-001 D

ENI OEM-12B-01 RF Generator, repaired, calibrated with

AE Advanced Energy RFPP LF-10 power supply RF generator

AE Advanced Energy LF-10 power supply RF generator RFPP

AE Advanced Energy HFV 8000 RF Generator 3155083-109

APEX 3513 RFgenerator Power supply A3M3K000EA120B0?01A,

APEX 3513 RFgenerator Power supply A3M3K000EA120B0?01A,

APEX 3513 RFgenerator Power supply A3M3K000EA 120B001A,

APEX 3513 RFgenerator Power supply A3M3K000EA 120B001A,

6 AMAT 0010-76173 Throttle valve hinge and isolation va

Unit 8560 Series DeviceNet UFC-8565 O2 He Lot’s of 8

ENI OEM-12B-07 RF Generator AMAT 0190-76048 calibrated,

8 MKS baratron 124A-11848, 2000 Torr Range, S141A, look

TWO CTI CRYOGENICS 8107813G001, 8F cryopump,

REICHERT EPISTAR MICROSCOPE 2571 Lots of 5

5 AMAT 0100-09054 Analog input PCB board, AMAT P5000

Tokyo Electron 1D10-100956-12 Bottom Electrode ESC

Recif IDLW8, OCR 200mm wafer system, Wafer ID Read